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P5000 PECVD

39 bytes added, 4 years ago
* Substrate Materials:
** Silicon
** High Purity Fused Silica wafers as long as they have been processed through a pre-furnace clean in the old RCA Clean Bench 81 in bay 1440Awith an extended 1 minute 10:1 HF etch.
<!--* Wafer type
* Any mounting?
Administrator, LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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