Jump to navigation Jump to search

Plasmatherm 790

2 bytes removed, 7 years ago
==Tool Qualification==
Every other week a light cleaning is performed on the tool. A 5 min etch with mnf_oxide1 m_si_o_1 is performed on a 4" oxide wafer. The results can be seen below.
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors


Navigation menu