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|materials = [[Si]], [[SiO2|SiO<sub>2</sub>]]
|mask = [[Photoresist|PR]], [[SiO2|SiO<sub>2</sub>]]
|gases = [[AR]], [[CH4|CH<sub>4</sub>]], [[CHF3|CHF<sub>3</sub>]], [[CF4|CF<sub>4</sub>]], [[H2|H<sub>2</sub>]], [[O2|O<sub>2</sub>]], [[SF6|SF<sub>6</sub>]]
|overview = [[{{PAGENAME}}#System_Overview | System Overview]]
|sop = [https://docs.google.com/a/lnf.umich.edu/document/d/1iRHIBHG0BvqpsX1quhb8YszCImOkyvzJx_SxqluPOt8/preview SOP]
