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Veeco Fiji ALD
1 byte removed
,
5 years ago
→System Overview
*Downstream 300 W RF plasma head for [[Ar|Ar]], [[O2|O<sub>2</sub>]], [[H|H]], [[N2|N<sub>2</sub>]] plasmas
*Software to run loops of dose/purge cycles to enable ALD
===Substrate Requirements===
Mwoonk
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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