Changes

Jump to navigation Jump to search

Veeco Fiji ALD

1 byte removed, 4 years ago
*Downstream 300 W RF plasma head for [[Ar|Ar]], [[O2|O<sub>2</sub>]], [[H|H]], [[N2|N<sub>2</sub>]] plasmas
*Software to run loops of dose/purge cycles to enable ALD
 
===Substrate Requirements===
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
904

edits

Navigation menu