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Veeco Fiji ALD

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|processes = [[ Supported Processes]]
The Veeco/Ultratech/Cambfidge Fiji is a plasma or thermal assisted [[atomic layer deposition]] (ALD) tool used to deposit a variety of oxides, nitrides and metals. It is a load locked tool which had has five channels for metal organic precursors, one channel for water and a plasma head with [[Ar|Ar]], [[O2|O<sub>2</sub>]], [[H|H]], and [[N2|N<sub>2</sub>]]
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