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STS Pegasus 4

60 bytes added, 4 years ago
==Maintenance== In order to provide reliable operating conditions, maintenance is performed weekly regularly on the tool including inspecting and cleaning the chamber. The following regular maintenance is performed on the STS Pegasus 4:
* Weekly
** General tool check
** Qualification wafer run
** Check wafer centering
* Monthly
** Wipe down chamber walls
** Clean process kit, clamping ring
** Plasma clean and condition
* Monthly** Check wafer centering** Clean clamping ring* Bi-annuallyAnnually
** Change and clean source ceramics
* AnnuallyBiennially
** Refurbish turbo pump
** Clean APC valve, foreline valve, baratron valve
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