Changes

Jump to navigation Jump to search

STS Pegasus 4

60 bytes added, 4 years ago
==Maintenance==
==Maintenance== In order to provide reliable operating conditions, maintenance is performed weekly regularly on the tool including inspecting and cleaning the chamber. The following regular maintenance is performed on the STS Pegasus 4:
* Weekly
** General tool check
** Qualification wafer run
** Check wafer centering
* Monthly
** Wipe down chamber walls
** Clean process kit, clamping ring
** Plasma clean and condition
* Monthly** Check wafer centering** Clean clamping ring* Bi-annuallyAnnually
** Change and clean source ceramics
* AnnuallyBiennially
** Refurbish turbo pump
** Clean APC valve, foreline valve, baratron valve
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,495

edits

Navigation menu