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ACS 200 cluster tool

753 bytes added, 1 year ago
{{infobox equipment
|caption =
|materials = [[SPR 220]], [[1813SPR 955|SPR 955 0.9]], and LNF approved photo resist syringes
|mask =
|size =
|gases =
|overview = [[{{PAGENAME}}#System_overview | System Overview]]
|sop = [https://docs.google.com/document/d/1kllBPlE3rimkcrjkLlaJyoa6BYINkp_9fhNZmkDhR3k/preview SOP]
|processes = [[{{PAGENAME}}/Processes|Supported Processes]]
|userprocesses = [[LNF_User:{{PAGENAME}}_user_processes|User Processes]]
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
}}
 {{warning|This page has not been released yet.}} The [[{{PAGENAME}}]] is an automated [[photoresist]] [[Lithography|coating, baking , vapor prime, stripping and developing]] tool. It can run full 4" and 6" cassettes of up to 25 wafers at a time. It's capable of having multiple paths running simultaneously (ie., coating and developing from two different cassettes). It automatically pumps [[SPR 220]]-(3.0) and [[SPR 955]] photoresists. Other resists can be set up to automatically dispense from a syringe. The spinner's closed lid option can help aid with more uniform sidewall coating. [[HMDS]] is applied via vapor prime. Both developers are CMOS compatible ([[MF 319]], and [[MF 300]]). The developer temperature is controlled to within 0.1°C throughout the process. ==Announcements==*Update this with announcements as necessary
==Capabilities==
* Automated spin coating
* Automated spray developing
* Automated vapor prime
* Photoresist stripping
* 4" and 6" wafers
{{note|[[PMMA]] and other e-beam resists should be processed in [[Photoresist Bench 31]] in 1480A|reminder}}
===Hardware details===
* RC-8 spin coater with gyrset closed cover option
* Spinner equipped with back side rinse arm for 4" wafers only
* 4" chuck will accommodate 6"
* [[SPR 220]]-(3.0) and [[SPR 955|SPR 955 0.9]] photo resists automatically dispensed.
* All other approved resists can be coated with EFD dispense option.
* Spray develop module fitted with [[MF 300]] and [[MF 319]]
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} -->
There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Processes/SPR 220]] pageand [[SPR 955]] pages.The tool is already equipped with various recipes for spin coating at different thicknesses, developing at different times and baking at different temperatures. If the tool is not equipped with a recipe that you need, then please create a helpdesk ticket.
<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->
<!-- In addition to these, users can create a helpdesk ticket requesting a modification of one of the standard recipes by a tool engnineerengineer. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]].-->
==Standard operating procedure==
<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
{{#widget:GoogleDoc|key=1kllBPlE3rimkcrjkLlaJyoa6BYINkp_9fhNZmkDhR3k1RQcdT_-BOGDHwU4Rf_C-xUL0lbHUDFxQaYZis66-n5k}}
==Checkout procedure==
<!-- Describe the checkout procedure for the tool. For example: -->
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training/checkout.
# A tool engineer will schedule a time for training/checkout
# Complete a [[Lithography training session]]. If you have already completed this for another tool, you do not need to complete it again.# Practice on the tool with your mentor.# Read through the User Manual above.# Accurately complete the [https://docs.google.com/forms/d/e/1FAIpQLSfDiKTeBkBx8wwwaLxeUDrVo99xP-wx31jRiDMqa72EP9BfaQ/viewform?usp==Maintenance== sf_link checkout quiz]. You may retake as necessary until all answers are correct.# Schedule a time for a checkout:Complete spinner clean and conditioning are done semi annually or as needed## Find an available time for checkout [https://calendly.com/lnf-lithography/acs-checkout here].Fluid and resist fills ## Verify that the tool is available in the [https://ssel-sched.eecs.umich.edu/sselscheduler/ResourceDayWeek.aspx?Path=0-0-0-{{#var:toolid}} LNF Online Services] at the time you are done/checked weeklyrequesting.Hot plate ovens checked bi weekly and cleaned as needed## After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.Spray develop checked weekly and maintained as needed# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket] for final confirmation of your checkout appointment.Robot training performed annually or as needed# Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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