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Plasmatherm 790

15 bytes added, 7 years ago
** [[SF6|SF<sub>6</sub>]] - 52 sccm
* PECVD Gases
** [[CH4|CH<sub>4</sub>]] - 72 sccm** [[CF4/O2|CF<sub>4</sub>]] - 420 sccm** [[He]] - 1000 500 sccm ** [[N2|N<sub>2</sub>]] - 2000 sccm** [[N20|N<sub>2</sub>O]] - 497 sccm** [[NH3|NH<sub>3</sub>]] - 3 sccm** [[SiH4|SiH<sub>4</sub>]] - 6 sccm
* Pressure
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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