Changes

Jump to navigation Jump to search

Plasmatherm 790

115 bytes added, 7 years ago
===Hardware Details===
* RIE Gases
** [[ARArgon|Ar]] - 139 sccm** [[CH4Methane|CH<sub>4</sub>]] - 18 sccm** [[CHF3Fluoroform|CHF<sub>3</sub>]] - 50 sccm** [[CF4Tetrafluoromethane|CF<sub>4</sub>]] - 42 sccm** [[H2Hydrogen|H<sub>2</sub>]] - 101 sccm** [[O2Oxygen|O<sub>2</sub>]] - 100 sccm** [[SF6Sulfur Hexafluoride|SF<sub>6</sub>]] - 52 sccm
* PECVD Gases
** [[CH4Methane|CH<sub>4</sub>]] - 72 sccm** [[CF4/O2Tetrafluoromethane|CF<sub>4</sub>O<sub>2</sub>]] - 420 sccm** [[Helium|He]] - 500 sccm ** [[N2Nitrogen|N<sub>2</sub>]] - 2000 sccm** [[N20Nitrous Oxide|N<sub>2</sub>O]] - 497 sccm** [[NH3Ammonia|NH<sub>3</sub>]] - 3 sccm** [[SiH4Silane|SiH<sub>4</sub>]] - 6 sccm
* Pressure
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,121

edits

Navigation menu