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Plasmatherm 790

56 bytes added, 7 years ago
==Capabilities==
<!--A more general description of what the tool is capable of doing.-->
* Etch RateWide variety of materials processed* ResolutionWide variety of gases available* Aspect Ratio* Thickness rangeGenerally slower etch rates <1000 Å/min
==System Overview==
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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