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ADT 7100 Dicing Saw

178 bytes added, 3 years ago
Note: If you foresee an issue with this procedure/process for your specific samples, you must submit a Helpdesk ticket for Staff to review.
 
For sapphire samples, follow all steps of procedure above, but substitute a 60 second 10:1 HF and SC2 clean instead of Piranha clean in ACID-92. Piranha will roughen sapphire.
<span style="color: red;">For samples to be allowed into CMOS Clean tools, follow the process above and then in addition, perform a pre-furnace clean in PFC-01.</span>
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