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MA6 Mask Aligner

781 bytes added, 1 year ago
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|size = 4" and 6" wafers
|chemicals = LNF approved photoresists
|overview = [https://drive.google.com/file/d/0B3k-qgz56T_4YWJLc2t3ZUJQZ2s/view?usp=sharing &resourcekey=0-54OMu8wX_SgVg3lwk8zSmQ System Overview ]|sop = [https://drive.google.com/file/d/0B3k-qgz56T_4WXo4VFVnWjI4R0k/view?usp=sharing &resourcekey=0-A8jY9b2Rzqq1OYCmiI7r_w Topside Mask Alignment SOP]
}}
==Standard operating procedure==
* [https://drive.google.com/file/d/0B3k-qgz56T_4YWJLc2t3ZUJQZ2s/view?usp=sharing &resourcekey=0-54OMu8wX_SgVg3lwk8zSmQ System Overview ]* [https://drive.google.com/file/d/0B3k-qgz56T_4WXo4VFVnWjI4R0k/view?usp=sharing &resourcekey=0-A8jY9b2Rzqq1OYCmiI7r_w Topside Mask Alignment SOP]* [https://drive.google.com/file/d/0B3k-qgz56T_4dTk2NlRQalNmMUk/view?usp=sharing &resourcekey=0-hq5tzpfZ3eoziMnhobUb2w Troubleshooting]
==Checkout procedure==
<!# Complete a [[Lithography training session]]. If you have already completed this for another tool, you do not need to complete it again.# Practice on the tool with your mentor.# Read through the User Manual above.# Accurately complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/1L5TToo8m1ZaTqTK5p8UJ6gEcPR_8UFawA21pygwi_34/viewform checkout quiz]. You may retake as necessary until all answers are correct.# Schedule a time for a checkout:## Find an available time for checkout [https://calendly.com/lnf-lithography/contact-aligner- Describe the checkout procedure for here].## Verify that the toolis available in the [https://ssel-sched.eecs.umich.edu/sselscheduler/ResourceDayWeek. For example: aspx?Path=0-0-0->{{#var:toolid}} LNF Online Services] at the time you are requesting.# Read through this page and # After confirmation that the event is scheduled in Calendly, invite the Standard Operating Procedure abovestaff member assigned to your event to a Staff Support reservation at that time.# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Tickethelpdesk ticket] requesting trainingfor final confirmation of your checkout appointment.# A tool engineer Authorization will schedule a time for initial training.# Practice with your mentor or another authorized user until you are comfortable with be provided pending demonstration of proper tool operation.# Schedule a checkout session with use in the presence of a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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