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ACS 200 cluster tool

173 bytes removed, 1 year ago
{{infobox equipment
|caption =
|materials = [[SPR 220]], [[SPR 955|SPR 955 0.9]], and LNF approved photo resist syringes
|mask =
|size =
|gases =
|overview = [[{{PAGENAME}}#System_overview | System Overview]]
|sop = [https://docs.google.com/document/d/1kllBPlE3rimkcrjkLlaJyoa6BYINkp_9fhNZmkDhR3k/preview SOP]
|processes = [[{{PAGENAME}}/Processes|Supported Processes]]
|userprocesses = [[LNF_User:{{PAGENAME}}_user_processes|User Processes]]
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
}}
The [[{{PAGENAME}}]] is an automated [[photoresist]] [[Lithography|coating, baking, vapor prime, stripping and developing]] tool. It can run full 4" and 6" cassettes of up to 25 wafers at a time. It's capable of having multiple paths running simultaneously (ie., coating and developing from two different cassettes). It automatically pumps [[SPR 220]]-(3.0) and [[SPR 955]] photoresists. Other resists can be set up to automatically dispense from a syringe. The spinner's closed lid option can help aid with more uniform sidewall coating. [[HMDS]] is applied via vapor prime. Both developers are CMOS compatible ([[MF 319]], and [[MF 300]]). The developer temperature is controlled to within 0.1°C throughout the process. ==Announcements==*Currently the developer module is down on the ACS. The parts have been back ordered and are suppose to arrive at latest Thursday February 14th. Please create a ticket if you have a time sensitive project.
==Capabilities==
* Spinner equipped with back side rinse arm for 4" wafers only
* 4" chuck will accommodate 6"
* [[SPR 220]]-(3.0) and [[SPR 955|SPR 955 0.9]] photo resists automatically dispensed.
* All other approved resists can be coated with EFD dispense option.
* Spray develop module fitted with [[MF 300]] and [[MF 319]]
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} -->
There are several processes for this tool supported by the LNF, which are described in more detail on the [[/SPR 220/]] and [[/SPR 955/]] pages.
The tool is already equipped with various recipes for spin coating at different thicknesses, developing at different times and baking at different temperatures. If the tool is not equipped with a recipe that you need, then please create a helpdesk ticket.
==Checkout procedure==
<!-- Describe the checkout procedure for the tool. For example: -->
# Complete a Lithography training session. If you have already completed this for another tool, you do not need to complete it again.
# Read through this page and the [https://docs.google.com/document/d/1RQcdT_-BOGDHwU4Rf_C-xUL0lbHUDFxQaYZis66-n5k/preview Standard Operating Procedure] above.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Complete the SOP quiz [https://docs.google.com/forms/d/e/1FAIpQLSfDiKTeBkBx8wwwaLxeUDrVo99xP-wx31jRiDMqa72EP9BfaQ/viewform?usp=sf_link here]
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training/checkout.
# A tool engineer will schedule a time for training/checkout
==Maintenance== # Complete a [[Lithography training session]]. If you have already completed this for another tool, you do not need to complete it again.# Practice on the tool with your mentor.Complete spinner clean is done monthly# Read through the User Manual above.Fluid and resist # Accurately complete the [https://docs.google.com/forms/d/e/1FAIpQLSfDiKTeBkBx8wwwaLxeUDrVo99xP-wx31jRiDMqa72EP9BfaQ/viewform?usp=sf_link checkout quiz]. You may retake as necessary until all answers are checkedcorrect.# Schedule a time for a checkout:## Find an available time for checkout [https://filled weeklycalendly.com/lnf-lithography/acs-checkout here].Hot plate ovens cleaned bi## Verify that the tool is available in the [https://ssel-sched.eecs.umich.edu/sselscheduler/ResourceDayWeek.aspx?Path=0-0-0-weekly or as needed{{#var:toolid}} LNF Online Services] at the time you are requesting.Spray developer ## After confirmation that the event is checkedscheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.# Create a [http://filled weeklyssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket] for final confirmation of your checkout appointment.Robot training performed annually or as needed# Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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