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Plasmatherm 790

218 bytes removed, 9 months ago
The Plasmatherm 790 is a dual chamber parallel plate tool. The left chamber is configured for [[Reactive ion etching|reactive ion etching (RIE)]] while the right chamber is configured for [[PECVD|plasma enhanced chemical vapor deposition (PECVD)]]. The RIE chamber is significantly slower than other etchers available in the lab, allowing greater depth control on thin films. The PECVD chamber is also designed to deposit at a lower rate than the [[GSI PECVD]] and [[P5000 PECVD]] - the smaller building blocks help improve film quality. This tool has almost no material restrictions, allowing a wide variety of processing.
==Announcements==
*[2014-09-25] - Added 500 sccm Helium MFC to PECVD chamber.
==Capabilities==
* PECVD Gases
** [[Methane|CH<sub>4</sub>]] - 72 sccm
** [[Tetrafluoromethane|CF<sub>4 - 4%</sub>- 4% O<sub>2</sub>]] - 420 sccm
** [[Helium|He]] - 500 sccm
** [[Nitrogen|N<sub>2</sub>]] - 2000 sccm
* Pressure
** RIE: 5 - 10 mTorr to 1 TorrGuage** PECVD: 50 - 500 mTorr to 2 TorrGauge
* Chuck
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==Standard Operating Procedure==
* [https://drive.google.com/open?id=1ISeylrCbnE2g8E1acoAKEbNmKXi6CH2f System Overview]
* [https://drive.google.com/openfile/d/0B3k-qgz56T_4RVJqUHp3eEsySUk/view?idusp=sharing&resourcekey=0B3k0-qgz56T_4RVJqUHp3eEsySUk ClQBXI80fBwIL1FR48tt7w RIE SOP]
* [https://drive.google.com/open?id=1iWQMtPGj8M9KQmTBJgTBk6jxuMiWCSk4 PECVD SOP]
* [https://drive.google.com/open?id=1QiY9Xwt1ucw9axn4JTanLy-OA4QeXEIU Troubleshooting]
==Checkout Procedure==
<!-- Describe the checkout procedure for the tool. For example: -->
# Read through the [https://driveUser Manual above.google.com/file/d/0B3k-qgz56T_4RVJqUHp3eEsySUk/view Standard Operating Procedure]# Complete Accurately complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/e/1FAIpQLSff-AcfmVpwlCTYKOQVe_sV0Rz_IE_B4vn0Pml7HX3eHcOC2w/viewform SOP quiz]. You may retake as necessary until all answers are correct.# Complete For RIE, complete the training request form [https://docs.google.com/a/lnf.umich.edu/forms/d/16kHlwOrAQk_nybzzXjYk78_aENmJiy33jJ7gj18lJKge/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform hereprocess request form].# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdeskticket] ticket requesting traininga checkout session.# A tool engineer Authorization will schedule a time for initial training.# Practice with your mentor or another authorized user until you are comfortable with be provided pending successful completion of the quiz and demonstration of proper tool operation.# Schedule a checkout session with use in the presence of a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Administrators
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