OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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{{#vardefine:toolid|61081}} {{#vardefine:technology|PVD}} {{#vardefine:restriction|3}}
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<!-- Set the resource ID, 5 digit # found on the scheduler --> {{#vardefine:toolid|61081}} <!-- Set the Process Technology (see subcategories on Equipment page) -->{{#vardefine:technology|PVD}} <!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals -->{{#vardefine:restriction|3}}
[[Sputter_deposition|< Sputter deposition]]
{{infobox equipment
|restriction = [[{{PAGENAME}}#Material_Restrictions|Semi-Clean]]
