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Lab 18-2

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[[Sputter_deposition|< Sputter deposition]]
<!-- Set the resource ID, 5 digit # found on the scheduler -->
{{#vardefine:toolid|61081}}
<!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals -->
{{#vardefine:restriction|3}}
[[Sputter_deposition|< Sputter deposition]]
{{infobox equipment
|restriction = [[{{PAGENAME}}#Material_Restrictions|Semi-Clean]]
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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