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Endeavor M1 AlN Sputter Tool

No change in size, 3 years ago
===Hardware Details===
*Turbo-pumped/Water -pumped (high temp cryo that acts as a water trap,) loadlocked sputtering tool.
*10 KW AC power supply that runs 5-7KW power across a dual Al target source
*RF bias on wafer holding platen to control surface characteristics.
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