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Endeavor M1 AlN Sputter Tool

32 bytes removed, 3 years ago
*Hysteresis is mapped to look at the N<sub>2</sub>/Ar ratios that produce a poisoned AlN state
**Users will want to run in the lower target voltage regime (AlN poisoned mode.)
**Since the condition recipe and the beginning of the deposition recipe run the target to a high N<sub>2</sub> flow state, (20-21 sccm) the deposition steps are operating on the N<sub>2</sub> "going down" (redorange) curve.
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