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Endeavor M1 AlN Sputter Tool

1 byte added, 3 years ago
**Users will want to run in the lower target voltage regime (AlN poisoned mode.)
**Since the condition recipe and the beginning of the deposition recipe run the target to a high N<sub>2</sub> flow state (20-21 sccm) the deposition steps are operating on the N<sub>2</sub> "going down" (orange) curve.
 
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