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Endeavor M1 AlN Sputter Tool

38 bytes removed, 3 years ago
<!--A more general description of what the tool is capable of doing.-->
*Piezoelectric AlN films 0.5-2.5 µm thick
**Deposition rates of up to 9 Å/sec**Variable gas flows and adjustable substrate resistance/capacitance to allow for stress control
==System Overview==
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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