Jump to navigation Jump to search

Endeavor M1 AlN Sputter Tool

15 bytes removed, 3 years ago
==Supported Processes==
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=googledocid}} -->
The Endeavor
*Aluminum Nitride ([[Aluminum Nitride|AlN]]) deposition.
**AlN is a 3-step process:
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser


Navigation menu