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Endeavor M1 AlN Sputter Tool

74 bytes added, 4 years ago
====AlN Thickness====
*AlN thickness is set in the recipe and the tool uses the target file data to determine the deposition rate.
**The deposition rate varies between 8.5-10.5 A/sec depending conditions.
**The Target file adjusts the deposition rate depending on the wear/age (KWhrs) of the target.
**Thickness data collected by users and staff in the logbook will be used to adjust and improve the accuracy of the target file.
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser


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