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Endeavor M1 AlN Sputter Tool

159 bytes added, 3 years ago
**Users can adjust the dial before their runs.
**Typically adjustments below 25 will lead to plasma instability issues so the vendor does not recommend going below that point.
**The response for 1um films is below. Thicker films (1.5-2.5um) usually have less compressive stress. Thinner films will have more compressive stress.
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