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Endeavor M1 AlN Sputter Tool

96 bytes added, 3 years ago
There is no maintenance allowed by users of this tool.
===Power Bump Recovery===
*In case of a power bump, nothing on the tool is critical or will lead to tool damage.
*The tool power up requires multiple steps and some system checks in the service aisle.
Therefore, in case of a power bump, please contact staff to perform the power bump recoveryand do not attempt to unload any wafers.
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser


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