Changes

Jump to navigation Jump to search

Endeavor M1 AlN Sputter Tool

96 bytes added, 3 years ago
==Maintenance==
There is no maintenance allowed by users of this tool.
===Power Bump Recovery===
*In case of a power bump, nothing on the tool is critical or will lead to tool damage.
*The tool power up requires multiple steps and some system checks in the service aisle.
Therefore, in case of a power bump, please contact staff to perform the power bump recoveryand do not attempt to unload any wafers.
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
904

edits

Navigation menu