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Endeavor M1 AlN Sputter Tool

29 bytes removed, 3 years ago
===Power Bump Recovery===
*In case of a power bump, nothing on the tool is time-critical or will lead to tool damage.
*The tool power up requires multiple steps and some system checks in the service aisle.
Therefore, in case of a for power bumprecovery, please contact staff to perform the power bump recovery and do not attempt to unload any wafers.
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