===Endeavor M1 Aluminum Nitride Sputter Tool===
Endeavor M1 Aluminum Nitride Sputter Tool}}
*Materials deposited: AlN, Al
*The Endeavor M1 tool is designed specifically for Piezoelectric AlN on either 4" or 6" wafers. It is a high temperature process that works only on certain substrates with specific seeding materials and the handler is designed to process both 4" (via 6" carrier) or 6" wafers.