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Sputter deposition

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===Endeavor M1 Aluminum Nitride Sputter Tool===
{{main|Endeavor M1 Aluminum Nitride Sputter ToolEndeavor_M1_AlN_Sputter_Tool}}
*Materials deposited: AlN, Al
*The Endeavor M1 tool is designed specifically for Piezoelectric AlN on either 4" or 6" wafers. It is a high temperature process that works only on certain substrates with specific seeding materials and the handler is designed to process both 4" (via 6" carrier) or 6" wafers.
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