Changes

Jump to navigation Jump to search

Sputter deposition

171 bytes removed, 3 years ago
no edit summary
*Materials deposited: AlN, Al
*The Endeavor M1 tool is designed specifically for Piezoelectric AlN on either 4" or 6" wafers. It is a high temperature process that works only on certain substrates with specific seeding materials and the handler is designed to process both 4" (via 6" carrier) or 6" wafers.
 
===Denton Explorer===
{{main|Denton Explorer-14}}
*The Denton Explorer is an open-loop 2-source magnetron sputter tool used as a Lab 18 backup for depositing metal films
===Lab 18-1===
Administrator, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
329

edits

Navigation menu