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LNF PVD Films

565 bytes added, 2 years ago
←[[PVD 75 Proline|Back to PVD 75]]'''
 
←[[Endeavor M1 AlN Sputter Tool|Back to Endeavor M1 AlN Sputter Tool]]'''
←[[Enerjet Evaporator|Back to Enerjet Evaporator]]'''
==PVD Materials Supported for General Use==
These are the PVD films currently supported in the LNF with maximum thicknesses listed.
 
*In the evaporators, maximum thickness numbers are total thickness of that material per run.
**They are determined by stress or material availible.
**If you run multiple layers of the same material, the sum total thickness of those layers must be below the maximum.
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If you do not see the film you need, you can request a new material to use as a private source.
*'''Unless there is a specific need, new materials will be added to the AE Evaporator or the PVD-75.'''
*The goal is to reduce contamination and down-time by keeping user-source rotation to a minimum on the more "standard," precious-metals-supporting tools ([http://lnf-wiki.eecs.umich.edu/wiki/Lab_18-2 Lab 18-2], Enerjet[http://lnf-wiki.eecs.umich.edu/wiki/EnerJet_Evaporator EnerJet]) and tools that support optical films ([http://lnf-wiki.eecs.umich.edu/wiki/Lab_18-1 Lab 18-1]) and contact films . ([http://lnf-wiki.eecs.umich.edu/wiki/SJ-20_Evaporator SJ-20.])
===Procedure for requesting a new material===
*Create a helpdesk ticket to inform LNF staff of your request, and to provide us with a forum to communicate with you.
*Your request will be reviewed by the LNF management and staff.
*This process can; , in some cases, take up to a month to complete.
*You must complete a New PVD Material Request form for every new material you bring into the PVD tools.
Due to issues of cross-contamination, process development of co-sputtered films will require the purchase of private targets and shields.
===KJLC Lab 18 Superuser access provides access to ===
*Target change
*Modify and run VP (variable parameter) recipes
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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