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Nanoquest II Ion Mill

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--> {{#vardefine:restriction|3}}
{{infobox equipment
|manufacturer = [https://intlvac.com/ Intlvac Thin Film]
|model = Nanoquest II
|caption =
|materials =
|mask =
|size =100 mm, 150 mm
|chemicals =
|gases = [[Ar]], [[O2|O<sub>2</sub>]], [[N2|N<sub>2</sub>]]
|overview = [[{{PAGENAME}}#System_overview | System Overview]]
|sop = not released <!--[https://link.to.google.doc/preview SOP]-->
|processes = [[{{PAGENAME}}/Processes|Supported Processes]]
|userprocesses = [[LNF_User:{{PAGENAME}}_user_processes|User Processes]]
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
}}
 
{{warning|This page has not been released yet.}}
<!-- Insert the tool description here -->
The [[{{PAGENAME}}]] is aan ion beam etching (ion milling) system manufactured by Intlvac Thin Film Corporation.It is used for non-reactive, anisotropic etching of thin films particularly for difficult to etch materials.It is capable of etch rates from 2 to 40 nm per minute (material dependent).
==Announcements==
{{note|Currently, use of None at this tool is restricted to users with high priority deadlines and who are assisting with etch rate characterizationtime. If you believe your process falls into these categories, please create a helpdesk ticket. There will be extensive initial training and practice due to the limited documentation currently published for the tool.|error}}
==Capabilities==
<!--A more general description of what the tool is capable of doing.-->
* Etch Rate* Resolution* Aspect Ratio* Thickness rangerates of < 2 nm/min up to > 40 nm/min for a wide variety of materials
==System overview==
===Hardware details===
* Source Gases** [[Ar]] - 50 sccm** [[O2|O<sub>2</sub>]] - 50 sccm** [[N2|N<sub>2</sub>]] - 50 sccm* Gas Ring** [[O2|O<sub>2</sub>]] - 50 sccm** [[N2|N<sub>2</sub>]] - 50 sccm{{note|Each gas can be delivered to either the source or gas ring, but not both}}
* Pressure
* Chuck* Ebara EMT3300MK turbo pump** Base pressure < 10<sup>-7</sup>* Actively cooled platen with Dri-chuck mounting system** 100 mm and 150 mm chucks available** 5°C - 40°C range* KRI RFICP220 gridded ion source* Chamber* Beam current up to 1500 mA* RF / Power Specs* Beam voltage up to 1000 V* Chemicals3" dia RF magnetron sputter cathode
===Substrate requirements===
* Wafer Size100 mm or 150 mm wafers* Wafer type* Any Smaller samples may be mounted to a carrier wafer at the [[sample mounting?station]]* Wafer thickness* 3 mm max height {{dubious}}
===Material restrictions===
==Supported processes==
<!-- We recommend creating a subpage detailing the supported processes {{main|{{PAGENAME}}/Processes}} Initial characterization data for several recipes provided by the tool, which will be generated if you leave vendor are shown in the link table below. Alternatively, you may include Data is for thermal oxide and SPR 220. Uniformity data is from the information thermal oxide measurement on this page150 mm wafers with 10 mm edge exclusion. In that case, the Supported Processes document from the equipment manual can be included here, using  {{#widget|class="wikitable sortable" style="text-align:center"|- ! Recipe Name !! Oxide Etch Rate<br/>(nm/min) !! SPR 220 Etch Rate<br/>(nm/min) !! Uniformity<br/>(10 mm EE)|-| style="text-align:left" | LNF_200VB_165IB_40VA || 3.4 || 1.8 || 4.1%|-| style="text-align:left" | LNF_300VB_320IB_60VA || 8.9 || || 4.5% |-| style="text-align:left" | LNF_400VB_510IB_80VA || 16.6 || 14.2 || 3.9%|-| style="text-align:left" | LNF_500VB_740IB_100VA || 27.2 || 21.7 || 4.9%|-| style="text-align:GoogleDocleft" | LNF_600VB_500IB_120VA || 23.2 || 18.6 || 1.5%|-|keystyle=googledocid}} "text-align:left" | LNF_600VB_990IB_120VA || 40.2 || 35.1 || 3.1%|-| style="text->align:left" | LNF_800VB_500IB_160VA || style="color: red;" | 25.4 || || 3.9%|}
There are several processes for this tool supported by the LNF{{note|For all process questions, which are described in more detail on fill out the [[https://docs.google.com/forms/d/e/Processes1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form]] pageand create a helpdesk ticket.|reminder}}
<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.-->
==Standard operating procedure==
<!-- To include {{note|This SOP is still currently a document from google docs, draft. Please use caution when using the line below, replace "googledocid" with the ID for tool and take note of any additional information or changes provided by the documenttool engineer. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->|error}}{{#widget:GoogleDoc|key=1uEOe2y17LWWYWknJb8xiF6oAEcbNvh1j8K-iHGOmzttY0evotZVnLViYATzzBc3wD9zD-lalyo69wzpaopr6O8}}
==Checkout procedure==
Please create a helpdesk ticket if # Complete the [[Sample_mounting#Training_modules|sample mounting course]]. If you have an urgent, high priority need already completed this for the another tool and include as much process information as possible. A staff member will contact , you regarding your process and schedule.<!-- Describe the checkout procedure for the tooldo not need to complete it again. For example:
# Read through this page and the Standard Operating Procedure above.
# Complete the training request form [httphttps://examplelinkdocs.google.com here/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form].
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
# A tool engineer will schedule a time for initial training.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Complete the SOP quiz [http://examplelink.com here].
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
-->
==Maintenance==
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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