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Sputter deposition

6 bytes added, 2 years ago
{{main|Endeavor_M1_AlN_Sputter_Tool}}
*Materials deposited: AlN, Al
*The Endeavor M1 tool is designed specifically for '''Piezoelectric AlN on either 4" or 6" wafers'''. It is a high temperature process that works only on certain substrates with specific seeding materials and the handler is designed to process both 4" (via 6" carrier) or 6" wafers.
===Lab 18-1===
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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