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Physical vapor deposition

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; Basic Overviews of PVD and Thin Film technology:
:*Milton Ohring, ''Material Science of Thin Films'', 2nd Edition, Academic Press, 2002.:*J. L. Vossen and W. Kern, eds., ''Thin Film Processes''. Academic Press, 1978.:*Krishna Seshan, ed., ''Handbook of Thin Film Deposition'', 3rd Ed, Elsevier, 2012:*S. A Campbell, ''The Science and Engineering of Microelectronic Fabrication'', 2nd Ed, Oxford Press, 2001
[[Category:PVD| ]]
[[Category:Deposition]]
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