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Physical vapor deposition

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Resistivity is an electrical measurement of the characteristic of the film . It can be measured on electrical structures (lengths of wiring lines) or on blanket films using the four-point probe. It is expressed in many units, typically μ-ohm-cm.
Resistivity is typically used to measure the quality of the film in terms of source purity or vacuum purity , but it can be changed by altering the density of the film (pressure, power and bias during sputtering).
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