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LNF Staff:Life Safety Systems

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<!-- This should be created as a sub-page of a tool and list the processes available on the tool, which can then be detailed in individual process sub-pages -->{{Infobox technology|image = |technology = LSS|names = LSS|equipment = [[:Category:ProcessesLSS equipment|List of LSS equipment]]{{#allow-groups:user}}
[[{{PAGENAME}}]] is a [[physical vapor deposition]] method of thin film deposition in which a high-purity source material (called a cathode or target) is subjected to a gas plasma (typically [[argon]]). The energetic atoms in this gas plasma collide with the target material and knock off source atoms which then travel to the substrate and condense into a thin film.
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