Jump to navigation Jump to search

Optical lithography

2 bytes added, 2 years ago
* [[ACS 200 cluster tool]] - HMDS is included in the standard spin processes in the ACS* [[Image Reversal Oven]] - Batch process small pieces up to 25 6" wafers.
===Photoresist Spinning===
** [[CEE Developer 2]]{{spaced ndash}}[[AZ 726]] and [[Microposit developer concentrate]]
* [[Base Bench 63]]{{spaced ndash}} Beaker development is useful for developing thick photoresist like [[KMPR]]
==Selection of type of optical lithography==
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors


Navigation menu