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Optical lithography

No change in size, 2 years ago
** 4" and 6" wafers
* Manual Spinners accept pieces up to 6" wafers
** [[CEE 200X photoresist spinner 1]]{{spaced ndash}}automatic dispense of [[SPR 220SPR_220|SPR 220 (3.0) and (7.0)]] and SPR 955 0.9** [[CEE 200X photoresist spinner 2]]{{spaced ndash}}automatic dispense of [[SPR 220SPR_220|SPR 220 (3.0)]] and [[1813]]
** [[CEE 100CB photoresist spinner]]{{spaced ndash}}fully manual spinner for photoresist and other polymers
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