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Optical lithography

No change in size, 2 years ago
m
** Automated spinning of [[SPR 200|SPR 220 (3.0)]] and [[SPR 955]]
** 4" and 6" wafers
* Manual Spinners spinners accept pieces up to 6" wafers
** [[CEE 200X photoresist spinner 1]]{{spaced ndash}}automatic dispense of [[SPR_220|SPR 220 (3.0) and (7.0)]] and [[SPR_955|SPR 955]]
** [[CEE 200X photoresist spinner 2]]{{spaced ndash}}automatic dispense of [[SPR_220|SPR 220 (3.0)]] and [[1813]]
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