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Optical lithography

2 bytes removed, 2 years ago
===Exposure===
;Stepper
*[[GCA AS200 AutoStep]]{{spaced ndash}} - Can run pieces up to 6" wafers.
;Contact Aligners
*[[MA-BA-6_Mask-Bond_Aligner|MA/BA-6 Mask/Bond Aligner]]{{spaced ndash}}4" and 6" wafers with backside alignment capability
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