Acid Bench 73 is a wet bench used for working with
[[:Category:Acid|acids ]], mostly for [[Wet etching|etching]] and [[cleaning]] of samples that have had metals and/or polymers on them. It is considered a [[Metals]] class tool, so wafers with metal are allowed in the bench with some restrictions. It is intended for use with mixed materials and all substrate sizes up to 6 inches with the main focus being on piece parts.
* Sink with goose neck
* Automated Bottle Wash
* [[Piranha Etch|Piranha Etch]]
[RCA Clean |RCA Organic]] * [[RCA Clean|RCA Ionic]]
If you wish to perform any other processes on this bench, they must be approved by a tool engineer. Please create a [http://ssel-sched.eecs.umich.edu/sselonline/?view=/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:71231 helpdesk ticket] for assistance.
==Standard operating procedure==
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Checkout on Acid Bench 73 also includes checkout [[Acid Bench 72]], and [[Acid Bench 82]]. Please be prepared for this when you reach steps 5 and 6.
# Take the [[General Wet Bench Training]], if you haven't already.
# Read through this page and the Standard Operating Procedure above.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
Open a [ http:// ssel-sched. eecs. umich.edu/ sselonline/ ?view=/ sselScheduler/ ResourceContact.aspx? tabindex= 3&path=0:0:0:71231 helpdesk ticket] and request a checkout. Please specify the process and the size of your sample. # A tool engineer will schedule a time for checkout.
# Complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/1IwHwa3JEJGcszwkrxN2yk-TBiL1SU6uSMczmbZ72MMk/viewform 1440 Acid Bench quiz].
# If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.
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===Staff=== There is a maintained beaker for gold and chrome etch - changed every 6 weeks