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SB-6E Bonder

505 bytes removed, 1 year ago
==System overview==
===Hardware details===
* Up to 550 500 °C chuck temp
* 30 kN tool Pressure
* 4" Chuck, 6" available by request
<!-- Describe the checkout procedure for the tool. For example: -->
# Read through this page and the Standard Operating Procedure above.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training, and to review your process needs.# A tool engineer will schedule Create a time for training and[http://or checkoutssel-sched.eecs.# Schedule a checkout session with a tool engineer via the helpdesk ticket systemumich. If this checkout is successful, the engineer will authorize you on the tooledu/sselScheduler/ResourceContactaspx?tabindex=3&path=Maintenance== *Anodic baseline run done monthly on 4" wafers*chamber opened and cleaned Semi annually or as needed*chucks cleaned every time they're changed or as needed*clamp and spacer calibration checked bimonthly *pressure uniformity tested as needed or when requested===Process name===<!-- This is an example a chart published with etch data. You can just replace the url with your own. -->0:0:0:{{#widgetvar:Iframe|url=chart url|width=800|height=400|border=0toolid}}helpdesk ticket] requesting checkout.# Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.
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