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===Hardware Details===
ACT935 Photoresist Stripper
Ammonia
Arsenic Pentafluoride
Arsenic Trichloride
Arsenic Trifluoride
Arsine
Boron Tribromide
Boron Trichloride
Boron Trifluoride
Carbonyl Fluoride
Chlorine
Chlorine Dioxide
Chlorine Trifluoride
Cupra Select
Diborane
Dichlorosilane
Digermane
Dimethylamine
Dimethylsilane
Disilane
Fluorine
Germane
Hexachlorodisilane
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Cyanide
Hydrogen Fluoride
Hydrogen Iodide
Hydrogen Selenide
Hydrogen Sulfide
n-Butylamine
Nitric Acid
Nitrogen Dioxide
Nitrogen Trifluoride
Phenyl Trichlorosilane
Phosgene
Phosphine
Phosphorous Oxychloride
Phosphorous Pentachloride
Phosphorous Pentafluoride
Phosphorous Tribromide
Phosphorous Trichloride
Phosphorous Trifluoride
Silane
Silicon Tetrachloride
Silicon Tetrafluoride
Stibine
Sulfur Tetrafluoride
Tertiarybutylarsine
Tertiarybutylphosphine
Tetrachlorosilane
Tetrakis (dimethylamino) titanium
Tin Tetrachloride
Titanium Tetrachloride
Trichlorosilane
Trimethylsilane
Tungsten Hexafluoride
Xenon Difluoride
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