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Stylus profilometry

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[[{{PAGENAME}}|{{PAGENAME}}  (contact profilometry)]] brings a stylus tip into direct contact with a sample in order to trace the topography of the surface. This technique is often used to measure step heights and feature sizes for samples which have etched patterns on them.
 
==Equipment==
 
===Dektak XT===
{{main|Dektak XT}}
Latest model Dektak profiler located in the main cleanroom. This tool has a fully automated stage and is capable of 3D mapping and scanning the full diameter of a 150 mm wafer.
===Dektak 6M===
{{main|Dektak 6M}}
Older model Dektak profiler located in the ROBIN lab (Wet Chemistry).
 
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<categorytree mode=pages>{{#var:acronym|{{PAGENAME}}}} equipment</categorytree>
==See also==
Other related wiki pages
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==Method of operation==
<!--==Materials==
Optional description of materials that can be processed by technology. I think the best example of where this comes in handy would be with LPCVD describing the difference between HTO and LTO.
-->
 
==Equipment==
 
===Dektak XT===
{{main|Dektak XT}}
Latest model Dektak profiler located in the main cleanroom. This tool has a fully automated stage and is capable of 3D mapping and scanning the full diameter of a 150 mm wafer.
===Dektak 6M===
{{main|Dektak 6M}}
Older model Dektak profiler located in the ROBIN lab (Wet Chemistry).
 
<!--===Complete tool list===
<categorytree mode=pages>{{#var:acronym|{{PAGENAME}}}} equipment</categorytree>
==See also==
Other related wiki pages
-->
Administrator, LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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