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Nanoquest II Ion Mill

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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
{{warning|This page has not been released yet.}}
<!-- Insert the tool description here -->
The [[{{PAGENAME}}]] is aan ion beam etching (ion milling) system manufactured by Intlvac Thin Film Corporation.It is used for non-reactive, anisotropic etching of thin films particularly for difficult to etch materials.It is capable of etch rates from 2 to 40 nm per minute (material dependent).
{{note|Currently, use of None at this tool is restricted to users with high priority deadlines and who are assisting with etch rate characterizationtime. If you believe your process falls into these categories, please create a helpdesk ticket. There will be extensive initial training and practice due to the limited documentation currently published for the tool.|error}}
<!--A more general description of what the tool is capable of doing.-->
* Etch rates of <2 nm/min up to >40 nm/min for a wide variety of materials
==System overview==
| style="text-align:left" | LNF_800VB_500IB_160VA || style="color: red;" | 25.4 || || 3.9%
{{note|For all process questions, fill out the [ process request form] and create a helpdesk ticket.|reminder}}
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==Standard operating procedure==
<!-- To include {{note|This SOP is still currently a document from google docs, draft. Please use caution when using the line below, replace "googledocid" with the ID for tool and take note of any additional information or changes provided by the documenttool engineer. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->|error}}{{#widget:GoogleDoc|key=1uEOe2y17LWWYWknJb8xiF6oAEcbNvh1j8K-iHGOmzttY0evotZVnLViYATzzBc3wD9zD-lalyo69wzpaopr6O8}}
==Checkout procedure==
Please create a helpdesk ticket if # Complete the [[Sample_mounting#Training_modules|sample mounting course]]. If you have an urgent, high priority need already completed this for the another tool and include as much process information as possible. A staff member will contact , you regarding your process and schedule.<!-- Describe the checkout procedure for the tooldo not need to complete it again. For example:
# Read through this page and the Standard Operating Procedure above.
# Complete the training request form [http here/forms/d/e/1FAIpQLSf4FcYP1XIoE-scXpXtmaegIzceSVe3uaR8e9P3K3LQAvn20w/viewform process request form].
# Create a [{{#var:toolid}} Helpdesk Ticket] requesting training.
# A tool engineer will schedule a time for initial training.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Complete the SOP quiz [ here].
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
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