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Optical lithography

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For prototyping and one-off jobs using the [[Heidelberg µPG 501 Mask Maker]] to directly expose a sample can be effective.
==Methods of operation==
==Methods of operation==
===Dehydration and HMDS===
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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