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===Thermal budget===
Temperature is important when determining Defined as the type amount of layer thermal energy that will be usedis transfered to the substrate, thermal budget is determined by temperature, time-at-temperature and heat transfer to the substrate. Higher temperature (and higher kinetic energy) methods of deposition will tend to have better step coverage/conformality, lower defects, better optical properties, and may have lower stress. However, lower temperatures methods may be needed to account for temperature limitations of the substrate, previously deposited layers and patterning/sacrificial layers. Deposition methods need to evaluated for temperature, time-at-temperature and heat transfer to the substrate to understand whether they are appropriate for use.
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