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Aluminum

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{{#vardefine:restriction|0}} <!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals, 4 = varies -->
{{Infobox Aluminum is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group. ==Processing Equipment==Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.|image ===Deposition Equipment===*[[Lab 18-2]]*[[Enerjet Evaporator]]*[[Angstrom Engineering Evovac Evaporator]]*[[PVD 75 Proline]] |caption ===Etching Equipment=== |category = *[[Acid Bench 12]] - maintained tank|properties =*[[Acid Bench 73]] - Beaker|names =*[[Acid Bench 80]] - Beaker}}*[[LAM 9400]]
Aluminium is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group. ===Characterization Equipment===*[[Dektak XT]]
==Processing ToolsApplications==Process technologies that can be used to deposit/pattern this material. If this *Aluminum is a substrate, refer to what tool/process restrictions there may be and possibly remove commonly deposited metal in the following sub-sectionslab. It has a high reflectivity for optical devices.
==Processes=Deposition Equipment====Depositoin Processes===*[[Electron_beam_evaporation|E-beam evaporation]]
===Etching Equipment===* Wet Etching**[[Acid Bench 12]] - maintained tank**[[Acid Bench 73]] - Beaker**[[Acid Bench 82Sputter_deposition|Sputter deposition]] - Beaker
===Etch Processes===* List of processes for this material[[Wet etching|Wet etching]]===Deposition===**Wet etching can be used to etch aluminum using [[Aluminum Etch]] at [[Acid Bench 12]], [[Acid Bench 73]], and [[ Acid Bench 80]]. *[[Reactive ion etching]]
===EtchingCharacterization Processes===Chemical etching is done using [[Aluminum Etch]]. You *The profilometer can find etch rates for aluminum from ["Etch rates for micromachining processing"] and ["Etch rates for micromachining processing-Part II"]be used to measure the thickness of your deposition.
==References==
*Citations'''Etch rates for micromachining processing''' https://ieeexplore.ieee.org/abstract/document/references 546406*'''Etch rates for this materialmicromachining processing-Part II''' https://ieeexplore.ieee.org/abstract/document/1257354
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