Changes

Jump to navigation Jump to search

Gold

195 bytes added, 2 years ago
no edit summary
{{warning|This page has not been released yet.}}
{{#vardefine:restriction|3}} <!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals, 4 = varies -->
{{Infobox material|image =|caption = |category = |properties =|names =}}Gold is generally used for conductive layers and occasionally in bonding applications. Due to its high mobility it is not allowed in most semiconductor equipment. Gold is commonly refereed to by it's atomic symbol Au.
Gold is generally used for conductive layers and occasionally in bonding applications. Due to its high mobility it is not allowed in most semiconductor equipment.==Processing Equipment=====Deposition Equipment===*[[Lab 18-2]]*[[Enerjet Evaporator]]*[[Cooke Evaporator]]*[[SJ-20 Evaporator]]*[[Angstrom Engineering Evovac Evaporator]]
===Etching Equipment===
*[[Acid Bench 12]]
*[[Acid Bench 73]]
*[[Acid Bench 82]]
*[[Plasmatherm 790]]
*[[STS Glass Etcher]]
==Applications==
Discuss common uses/applications *Conducting Layer*Bond Pads*Bonding material for this material[[Eutectic bonding]] or [[Thermal Compression bonding]].
==Processing ToolsProcesses==Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub===Deposition Processes===*[[Electron_beam_evaporation|E-sections.beam evaporation]]*[[Sputter_deposition|Sputter deposition]]*[[Gold Plating]]
===EquipmentEtch Processes===*Deposition**[[Lab 18-2Wet etching]]**Wet etching is done by using Transene [[Enerjet EvaporatorGold Etch]]**8111. Gold etchant 8111 is a cyanide free based etchant that provides strong definition with minimal undercutting. Gold etchant is potassium iodide and iodine based. You can get a good estimate of etch gold etch rates through other chemicals from [[Cooke Evaporator]]**[[SJ-20 Evaporator]]**[[SJ-26 Evaporator]]**[[Angstrom Engineering Evovac Evaporator]]*Etching**[[Acid Bench 12]]**[[Acid Bench 73]]**[[Acid Bench 82]"Etch rates for micromachining processing"]**[and [Plasmatherm 790]]**[[STS Glass Etcher]] * List of equipment "Etch rates for micromachining processing this material ===Processes===*Deposition**[[Evaporated Gold-Part II"]]**[[Plated Gold]]**[[Sputtered Gold]] *List of chemical (or otherwise) processes for this material
==References==
*[http://en.wikipedia.org/wiki/Gold Wikipedia : Gold]
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
1,254

edits

Navigation menu