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LAM 9400/Processes

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<!-- This should be created as a sub-page of a tool and list the processes available on the tool, which can then be detailed in individual process sub-pages -->
[[Category:Processes]]
{{warning|This page has not been released yet.}} ==Description==The LAM 9400 has a variety of processes available. There are standard supported recipes for poly, oxide and nitride, although there are many more materials etched by via user created recipes.
===Proccess List===
*[[{{PAGENAME}}/mnf_nitride1]]
*: An etch designed to be selective to oxide
*[[{{PAGENAME}}/POLY_ETCH_2LNF_Poly]]
*: An etch designed for polysilicon
*[[{{PAGENAME}}/LNF_Ti_thin]]
*[[{{PAGENAME}}/LNF_Aluminum]]
*[[{{PAGENAME}}/LNF_Al2O3]]
*[[{{PAGENAME}}/LNF_TiN_sel_Al2O3]]
*[[{{PAGENAME}}/LNF_HfO2]]
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