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PDMS

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PDMS is Processed in [[Solvent Bench 94]]. See [[Solvent Bench 94/Processes]]
===Etching===
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Typically PDMS is etched with a mixture of O<sub>2</sub> and a fluorine-containing gas such as SF<sub>6</sub> or CF<sub>4</sub>.
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* [[Plasmatherm 790]]
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