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Aluminum
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*[[Acid Bench 82]] - Beaker
==
Depositoin
Processes==
====
*
[[Electron_beam_evaporation|E-beam evaporation]]
====
====
*
[[Sputter_deposition|Sputter deposition]]
====
=
==Etch Processes
=
==
====
*
[[Wet etching|Wet etching]]
====
Wet etching can be used to etch aluminum using [[Aluminum Etch]]
*[[Acid Bench 12]]
*[[Acid Bench 73]]
==References==
*'''Etch rates for micromachining processing''' https://ieeexplore.ieee.org/abstract/document/546406
*'''Etch rates for micromachining processing-Part II''' https://ieeexplore.ieee.org/abstract/document/1257354
Beach
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