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Aluminum

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==Applications==
*Discuss common uses/applications for this material. Why this materials is used in the LNF?
 
==Processing Equipment==
Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
===Deposition Equipment===
*[[Acid Bench 80]] - Beaker
*[[LAM 9400]]
 
===Characterization Equipment===
*[[Dektak XT Surface Profilometer]]
 
==Processing Equipment==
Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
 
==Processes==
===Depositoin Processes===
**Wet etching can be used to etch aluminum using [[Aluminum Etch]] at [[Acid Bench 12]], [[Acid Bench 73]], and [[ Acid Bench 80]].
*[[Reactive ion etching]]
 
===Characterization Processes===
*The profilometer can be used to measure the thickness of your deposition.
==References==
*'''Etch rates for micromachining processing''' https://ieeexplore.ieee.org/abstract/document/546406
*'''Etch rates for micromachining processing-Part II''' https://ieeexplore.ieee.org/abstract/document/1257354
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